فهرس المقالات Microelectromechanical Systems

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  1 - Micro Electropolishing of the MEMS Metallic Structures Fabricated by the Micro WEDM Process
  Mohammad Tahmasebipour Younes Tahmasebipour Mahya Boujari Aliabadi Shadi Ebrahimi
  10.30486/admt.2022.1928592.1277
  In this study, the micro electro-polishing method was employed to improve the surface quality of microbeams machined by the micro WEDM method and to remove the recast layer. This approach changes the dimensions of the microbeams, as a result of the electrochemical corro أکثر

  In this study, the micro electro-polishing method was employed to improve the surface quality of microbeams machined by the micro WEDM method and to remove the recast layer. This approach changes the dimensions of the microbeams, as a result of the electrochemical corrosion, in addition to the elimination of the recast layer. To diminish the impact of this process on the dimensional deviation of the fabricated microbeams, the influence of the micro electro-polishing process parameters such as voltage, duration, cathode diameter, and electrolyte composition on the dimensional deviation of microbeams was studied using the Taguchi method. The optimum values of process parameters were determined by the S/N ratios analysis, and the order of parameters importance was determined through analysis of variance of the S/N ratios. It was found that the optimal levels of the process parameters are voltage of 2 V, process duration of 20 s, cathode diameter of 50 mm, and electrolyte composition of 25-5-40 ml (sulfuric-phosphoric-water) within the range of experiments. By using the optimum values of the parameters, the dimensional deviations were found to be 5.23 times lower compared to the average of the results. The importance of process parameters was found to follow this order: electropolishing duration, electrolyte composition, cathode diameter, and process voltage. تفاصيل المقالة
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  2 - Design and Simulation of a Dual-Mode Resonant Temperature sensor Based on MEMS Technology
  Elham Farzanegan Farshad Babazadeh
  In this paper, a dual-mode (DM) micromechanical elliptical ring resonator for use in temperature sensing is reported. The proposed resonator is made of single crystal silicon and works based on beat frequency (fb). In the designed sensor, temperature coefficient of beat أکثر

  In this paper, a dual-mode (DM) micromechanical elliptical ring resonator for use in temperature sensing is reported. The proposed resonator is made of single crystal silicon and works based on beat frequency (fb). In the designed sensor, temperature coefficient of beat frequency (TCfb) will be increased significantly by minimizing the fb and provides better temperature sensitivity. This proposed device was designed and simulated by COMSOL Multyphysics software. By engineering the device geometry, we introduce two adjacent resonant frequencies which produce very small fb in the range of 2 kHz. The device shows TCf1 of about 44 ppm/ºC and TCf2 of 5 ppm/ºC. Combination of small fb and large ΔTCf, present temperature coefficient of beat frequency (TCfb) about 112000 ppm/ºC which has approximately 75improvement in TCfb compared to previous demonstrated DM resonators. تفاصيل المقالة
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  3 - Design and simulation of a fast SAW waveguide with Comsol software
  Hadi Amos Majid Ghandchi
  In this paper, the structure of SAW has been studied. In previous work in SAW, materials such as lithium niobium, lithium tantalite and gallium nitride were used in the structure of SAW, and thus had a low operating frequency and the highest reported operating frequency أکثر

  In this paper, the structure of SAW has been studied. In previous work in SAW, materials such as lithium niobium, lithium tantalite and gallium nitride were used in the structure of SAW, and thus had a low operating frequency and the highest reported operating frequency was about 4 GHz. In this paper, aluminum nitride and gallium nitride in the SAW structure are used in combination. The electrodes used in the structure are also made of aluminum. Comsol software was used to simulate the structure, and for the structure, the operating frequency was 7.02 GHz.and this wave guide by this design have a better performance of another structures تفاصيل المقالة