• فهرس المقالات Glow discharge plasma

      • حرية الوصول المقاله

        1 - Optical imaging and magnetic field simulation of a DC circular planar magnetron sputtering discharge
        Ahmad Rastkar Ali Reza Niknam Mostafa Salahshoor
        In this paper, the optical images of glow discharge plasma and the finite element method simulation of the magnetic field strength in a balanced and two types of unbalanced DC circular planar magnetron sputtering sources are presented. The investigation showed that wher أکثر
        In this paper, the optical images of glow discharge plasma and the finite element method simulation of the magnetic field strength in a balanced and two types of unbalanced DC circular planar magnetron sputtering sources are presented. The investigation showed that wherever the magnetic field strength is stronger, the intensity of light and the ionization are greater and consequently, the deposition is higher. The comparison of recorded optical images with the finite element simulation results of the magnetic field strength indicated the correlation between regions of high magnetic field strength and high light emission. تفاصيل المقالة
      • حرية الوصول المقاله

        2 - Effect of negative oxygen ions on the characteristics of plasma in a cylindrical DC discharge
        Davoud Dorranian Mahsa Alizadeh
        AbstractLangmuir probe measurements are performed in cylindrical dc glow discharge plasma. Plasma was generated in an evacuated glass tube, with circular plane disk electrodes. Measurements were carried out at different points along the axis of tube for different workin أکثر
        AbstractLangmuir probe measurements are performed in cylindrical dc glow discharge plasma. Plasma was generated in an evacuated glass tube, with circular plane disk electrodes. Measurements were carried out at different points along the axis of tube for different working pressures of pure argon and mixture of argon–oxygen gasses to obtain the plasma density and temperature as well as plasma and floating potentials. Variation of discharge potential as a function of discharge pressure for both plasmas is observed. It is shown that electron temperature, plasma potential, and floating potential in constant current mode and constant pressure are increased from cathode to anode on the axial points of the discharge tube, while electron density is decreased. To sustain the discharge process after adding oxygen to plasma, higher voltage is required since electrons are more energetic at lower density. تفاصيل المقالة