%0 Journal Article %A Zaminpayma, Esmaeil %T Simulation of Fabrication toward High Quality Thin Films for Robotic Applications by Ionized Cluster Beam Deposition %J Journal of Computer & Robotics %V 11 %N 2 %P 1-6 %D 2018 %R %U https://sanad.iau.ir/fa/Article/945957