Raman Analysis of DLC Nanostructure Coating on AL 6061-T6 Made by DC Pulsed- PACVD
الموضوعات :Seyed Mohammad Mahdi Shafiei 1 , Hamed Raeiesifard 2
1 - Department of Mechanical Engineering, West Tehran Branch, Islamic Azad University, Tehran, Iran|Department of Mechanical Engineering, Roudehen Branch, Islamic Azad University, Tehran, Iran
2 - Department of Mechanical Engineering, West Tehran Branch, Islamic Azad University, Tehran, Iran
الکلمات المفتاحية: Raman, Aluminum, DLC, Nano-indentation, PACVD,
ملخص المقالة :
Plasma assisted chemical vapor deposition (PACVD) technique was used to make a diamond-like carbon (DLC) coating on the Aluminum 6061- T6 substrate. The deposition was carried out using CH4 as the process gas, at different temperatures, 250°C and 300°C with constant power and flow rate. Characterization technique Raman spectroscopy was used to characterize these samples. Raman analysis of DLC coatings at different temperatures is carried out in detail for two different excitation wavelengths i.e. 514 and 785 nm and, results are presented in the paper. Blue shifts were observed in both D and G peaks of the Raman spectrum with an increase in deposition temperature, which indicates the formation of compressive strain in high-temperature deposited DLC coatings. Dispersion in both D and G peaks is observed for different excitation wavelengths suggesting that the coating is hydrogenated DLC. The degree of hydrogenation of the DLC coating appears to decrease for the deposition temperature. Nano-indentation study shows a marginal increase in hardness with an increase in deposition temperature.
[1] Grill A. 1999. Diamond-like carbon: state of the art. Diamond and Related Materials. 8: 428-434.
[2] Grill A. 1994. Meyerson B. Spear K.E., and Dismukes J.P. (Eds.). Synthetic Diamond: Emerging CVD Science and Technology. Wiley, New York.
[3] Lifshitz Y. 1999. Diamond-like carbon-present status. Diamond and Related Materials. 8: 1659-1676.
[4] Klyui N.I. Litovchenko V.G., Kostylyov V.P., Rozhin A.G., Gorbulik V.I., Voronkin M.A. and Zaika N.I. 2000. Silicon solar cells with anti-reflecting and protective coatings based on diamond- like carbon and silicon carbide films. Opto-Electronics Review. 8(4): 406-409.
[5] Oliveira, M.H. Jr., Silva D.S., Côrtes A.D.S., Namani M.A.B. and Marques F.C. 2009. Diamond like carbon used as antireflective coating on crystalline silicon solar cells, Diamond & Related Materials. 18: 1028–1030.
[6] Thomson L. A., Frances, C. Law, Rushton N. and Franks, J. 1991. Biocompatibility of diamond-like carbon coating, Biomaterials. 12: 37-40.
[7] Gonta,r A.G., Starik, S.P., Tkach, V. M, Gorochov, V. Y., Gorshtein, B. A. and Mozkova, O.M. 2005. Application of Diamond like Films for Improving Transparency in the IR, Innovative Super hard Materials and Sustainable Coatings for Advanced Manufacturing. Part of the NATO Science Series II: Mathematics, Physics and Chemistry Book Series. Springer.
[8] Clay K.J., Speakman S.P., Morrison N.A., Tomozeiu N., Milne W.I. and Kapoor A. 1998. Material properties and triboloical performance of rf-PECVD depositrd DLC coatings. Diamond and Related Materials. 7: 1100-1107.
[9] Monaghan D.P., Teer, D.G., Logan, P.A., Efeoglu, I. and Arnell, R.D. 1993. Deposition of wear resistant coatings based on diamond like carbon by unbalanced magnetron sputtering. Surface and Coatings Technology. 60: 525-530
[10] Fedosenko, G., Korzec D., Schwabedissen, A., Engeman, J. N, Braca, E. and Kenny, J.M. 2001. Comparison of diamond-like carbon films synthesized by 2.45 GHz microwave and 13.56 MHz multi-jet radiofrequency plasma sources. Diamond and Related Materials. 10: 920-926.
[11] Ravi, N., Bukhovets, V. L., Varshavskaya, I. G. and Sundararajan, G. 2007. Deposition of diamond-like carbon films on aluminum substrates by RFPECVD technique: Influence of process parameters. Diamond & Related Materials. 16: 90-97
[12] Yamada, H., Tsuji, O. and Wood, P. 1995. Stress reduction for hard amorphous hydrogenated carbon thin films deposited by the self-bias method. Thin Solid Films. 270: 220-225
[13] Erdemir, A., Nilufer I., Eryilmaz, Beschliesser, O. M. and Fenske, G. 1999. Friction and wear performance of diamond-like carbon films grown in various source gas plasmas. Surface and Coatings Technology. 120-121: 589-593.
[14] Liu, H., Tanaka, A. and Umeda, K. 1999. The tribological characteristics of diamond-like carbon films at elevated temperatures. Thin Solid Films. 346: 162-168.
[15] Donnet, C. and Erdemir, A. 2008. Tribology of Diamond-Like Carbon Films: Fundamentals and Applications. Springer Science and Business Media, Springer.
[16] Roy, R.K. and Lee, K.-R. 2007. Biomedical Applications of Diamond-Like Carbon Coatings: A Review. Journal of Biomedical Materials Research Part B: Applied Biomaterial. 83B: 72-84.
[17] Dearnaley G., and Arps J. H. 2005. Biomedical applications of diamond-like carbon (DLC) coatings: A review. Surface & Coatings Technology. 200: 2518–2524.
[18] Ferrari A.C. 2002. Determination of bonding in diamond-like carbon by Raman spectroscopy. Diamond and Related Materials. 11: 1053– 1061
[19] Ferrari, A.C and Robertson. J. 2014. Raman spectroscopy of amorphous nano-structured, diamond-like carbon, and nano-diamond. Philosophical Transactions of the Royal Society. A. 362: 2477–2512.
[20] Hebatalrahman, A. 2022. Development of New Technique for Reverse Engineering by Microstructure Features Detection. Journal of Modern Processes in Manufacturing and Production. 11:5-16.
