Characterization of the Viscoelastic Q-Factor of Electrically Actuated Rectangular Micro-Plates

الموضوعات :

E Keykha ¹ (Department of Mechanical Engineering, University of Sistan and Baluchestan, Zahedan, Iran)
H Rahmani ² (Department of Mechanical Engineering, University of Sistan and Baluchestan, Zahedan, Iran)
H Moeinkhah ³ (Department of Mechanical Engineering, University of Sistan and Baluchestan, Zahedan, Iran)
M Salehi Kolahi ⁴ (Department of Mechanical Engineering, University of Sistan and Baluchestan, Zahedan, Iran)

تاريخ الإرسال : 10 السبت , ذو الحجة, 1443 تاريخ التأكيد : 18 الأربعاء , صفر, 1444 تاريخ الإصدار : 07 الخميس , جمادى الأولى, 1444

الکلمات المفتاحية: Electrical actuation, Q-factor, MEMS, Viscoelasticity, Micro-plate,

ملخص المقالة :

Regarding the necessity of designing high Q-resonators in micro electromechanical systems, this paper investigates the viscoelastic behavior of a rectangular micro-plate subjected to electrical actuation. Equations governing the vibrations of the homogeneous plate were obtained on the basis of classical plate theory (Kirchhoff's model). The Kelvin–Voigt model was also employed to consider the viscoelastic properties. The Galerkin decomposition method was used for decomposition of the governing differential equations. Additionally, the effects of various parameters were investigated on the Q-factor. Furthermore, a Finite Element simulation is carried out using COMSOL Multiphysics. The verification of the proposed model was conducted by comparing the obtained results with those from previous studies which revealed the validity of the proposed approach and the accuracy of the assumptions made The suggested design approach proposed in this this study is expected to design high Q-factor micro resonators and may be used to improve the performance of many MEMS devices.

المصادر:

1.  Bogue R.,2009, The Fast‐Moving World of MEMS Technology, Assembly Automation.


2. Senturia S.D.,2009, Microsystem Design, Kluwer Academic Publishers, Boston.


3. Judy J.W., 2001, Microelectromechanical systems (MEMS): fabrication, design and applications, Smart Materials and Structures 10(6):1115.


4. Younis M.I., 2011, MEMS Linear and Nonlinear Statics and Dynamics, Springer Science & Business Media.


5. Krylov S., Ilic B.R., Schreiber D., Seretensky S., Craighead H., 2008, The pull-in behavior of electrostatically actuated bistable microstructures, Journal of Micromechanics and Microengineering 18(5): 055026.


6. Sharma J., Grover D., 2012, Thermoelastic vibration analysis of Mems/Nems plate resonators with voids, Acta Mechanica 223(1):167-187.


7. Pourkamali S., Hashimura A., Abdolvand R., Ho G.K., Erbil A., Ayazi F., 2003, High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps, Journal of Microelectromechanical Systems 12(4): 487-496.


8. Nayfeh A.H., Younis M.I., 2004, Modeling and simulations of thermoelastic damping in microplates, Journal of Micromechanics and Microengineering 14(12): 1711.


9. Grootenhuis P., 1970, The control of vibrations with viscoelastic materials, Journal of Sound and Vibration 11(4): 421-433.


10. Vogl G.W., Nayfeh A.H., 2003, A reduced-order model for electrically actuated clamped circular plates, International Design Engineering Technical Conferences and Computers and Information in Engineering Conference.


11. Zhao X., Abdel-Rahman E.M., Nayfeh A.H., 2004, A reduced-order model for electrically actuated microplates, Journal of Micromechanics and Microengineering 14(7): 900.


12. Murmu T., Pradhan S., 2009, Small-scale effect on the free in-plane vibration of nanoplates by nonlocal continuum model, Physica E: Low-dimensional Systems and Nanostructures 41(8):1628-1633.


13. Talebian S., Rezazadeh G., Fathalilou M., Toosi B., 2010, Effect of temperature on pull-in voltage and natural frequency of an electrostatically actuated microplate, Mechatronics 20(6): 666-673.


14. Saghir S., Younis M.I., 2016, An investigation of the static and dynamic behavior of electrically actuated rectangular microplates, International Journal of Non-Linear Mechanics 85: 81-93.


15. Li Z., Zhao L., Jiang Z., Zhao Y., Li J., Zhang J., Zhao Y., Lin L., 2018, A closed-form approach for the resonant frequency analysis of clamped rectangular microplates under distributed electrostatic force, Sensors and Actuators A: Physical 280: 447-458.


16. Grover D., Seth R., 2019, Generalized viscothermoelasticity theory of dual-phase-lagging model for damping analysis in circular micro-plate resonators, Mechanics of Time-Dependent Materials 23(1):119-132.


17.  Lifshitz R., Roukes M.L., 2000, Thermoelastic damping in micro-and nanomechanical systems, Physical Review B 61(8): 5600.


18. Duwel A., Candler R.N., Kenny T.W., Varghese M., 2006, Engineering MEMS resonators with low thermoelastic damping, Journal of Microelectromechanical Systems 15(6):1437-1445.


19. Sun Y., Saka M., 2010, Thermoelastic damping in micro-scale circular plate resonators, Journal of Sound and Vibration 329(3): 328-337.


20. Borjalilou V., Asghari M., Bagheri E., 2019, Small-scale thermoelastic damping in micro-beams utilizing the modified couple stress theory and the dual-phase-lag heat conduction model, Journal of Thermal Stresses 42(7): 801-814.


21. Yang L., Li P., Fang Y., Zhou H., 2020, Thermoelastic damping in bilayer microbeam resonators with two-dimensional heat conduction, International Journal of Mechanical Sciences 167:105245.


22. Leissa A.W., Qatu M.S., 2011, Vibrations of Continuous Systems, McGraw-Hill.


23. Rao S.S., 2007,Vibration of Continuous Systems,Wiley Online Library.


24. Lei Y., Adhikari S., Friswell M., 2013, Vibration of nonlocal Kelvin–Voigt viscoelastic damped Timoshenko beams, International Journal of Engineering Science 66:1-13.


25. Amabili M., 2016, Nonlinear vibrations of viscoelastic rectangular plates, Journal of Sound and Vibration 362:142-156.


26. Li Z., Zhao L., Jiang Z., Ye Z., Dai L., Zhao Y., 2015, Mechanical behavior analysis on electrostatically actuated rectangular microplates, Journal of Micromechanics and Microengineering 25(3): 035007.


27. Zener C., 1937, Internal friction in solids. I. Theory of internal friction in reeds, Physical Review 52(3): 230.


28. Sun Y., Fang D., Soh A.K., 2006, Thermoelastic damping in micro-beam resonators, International Journal of Solids and Structures 43(10): 3213-3229.


29. Nayfeh A.H., Younis M.I., Abdel-Rahman E.M., 2007, Dynamic pull-in phenomenon in MEMS resonators, Nonlinear Dynamics 48(1):153-163.