Simulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method

Subject Areas :

Amin  Rouhani Esfahani ¹ (M.Sc. Student, Department of Mechanical Engineering, Najafabad Branch, Islamic Azad University)
Mojtaba  Kolahdouzan ² (Assistant Professor, Department of Mechanical Engineering, Najafabad Branch, Islamic Azad University)
Mehran  Moradi ³ (Assistant Professor, Department of Mechanical Engineering, Isfahan University of Technology)

Received: 2015-11-24 Accepted : 2015-11-24 Published : 2013-08-01

Keywords: Finite element simulation, Microgripper, Electrothermal Actuator, MEMS,

Abstract :

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation created using electrostatic, electrothermal, and electromagnetic actuators. In this paper, a new design of an electrothermal microgripper with U-shape actuators for holding and carrying a wide range of parts at the same time, For voltages corresponding between 1 to 10 volts, have been fabricated. The microgripper is made of silicone with thickness of 25 microns, and pieces between 460 to 480 microns that can hold it. The behavior of the microgripper in Multi physics powerful finite element software (COMSOL) was evaluated and the displacements of arms hold and heat generations have been simulated.