Influence of N2/Ar flow ratio on the structural, mechanical properties and corrosion behavior of TaN films

Subject Areas : Smart & Advanced Materials

مهدی منوچهریان ^{1 *}

1 - Department of physics, south Tehran branch, Islamic Azad university, Tehran, Iran

Received: 2023-05-26 Accepted : 2023-05-26 Published : 2022-05-22

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