بررسی تاثیر مشخصات لایه آلومینیومی بر عملکرد آشکارساز نوری MSM سیلیکنی

محورهای موضوعی : انرژی های تجدیدپذیر

مریم زارع پور ¹ (دانشکده مهندسی برق- واحد فسا، دانشگاه آزاد اسلامی، فسا، شیراز، ایران)
حامد دهدشتی جهرمی ² (دانشکده مهندسی- دانشگاه جهرم، جهرم، ایران)

تاریخ دریافت : 1400/02/15 تاریخ پذیرش : 1400/04/31 تاریخ انتشار : 1401/03/01

کلید واژه: آشکار‌ساز نوری MSM, پاسخ نوری, جریان تاریک, جریان نوری, تابع کار,

چکیده مقاله :

آشکارساز نوری فلز-نیمه‌هادی-فلز از دو پیوند شاتکی و روزنه‌هایی برای جذب فوتون تشکیل شده و جریان تاریک کمی دارد. در این مقاله، به بررسی تاثیر مشخصات اتصال آلومینیومی بر جریان‌های تاریک و نوری و پاسخ نوری آشکارساز فلز- نیمه هادی-فلز (MSM) سیلیکنی پرداخته شده است. با توجه به روش رشد لایه فلزی، تابع کار یک فلز می‌تواند در یک بازه محدود تغییر کند. تاثیر تغییرات تابع کار آلومنیوم بر عملکرد آشکارساز مذکور مطالعه شده است. پس از تعیین تابع کار بهینه لایه فلزی، تاثیر ضخامت لایه آلومینیومی بر عملکرد آشکارساز بررسی شده است. نتایج به دست آمده نشان می‌دهد تابع کار و ضخامت لایه آلومینیوم تاثیر مستقیمی بر جریان تاریک، جریان نوری و پاسخ نوری قطعه دارد. تاثیر این دو مولفه بر پارامترهای آشکارساز نوری مذکور به نحوی است که می‌تواند ساختار را از حالت آشکارسازی خارج کرده و تبدیل به یک مقاومت الکتریکی نماید. بنابراین لازم است برای ساخت، با انتخاب روش لایه نشانی مناسب و ضخامت لایه فلزی مناسب، پارامترهای مذکور بهینه شوند. در این تحقیق برای یک آشکارساز نوری MSM با ساختار متقارن، تابع کار بهینه برابر با 26/4 الکترون ولت به دست آمد. توابع کار کمتر از این مقدار منجر به ایجاد اتصال اهمی بین لایه آلومینیومی و لایه سیلیکنی و توابع کار بیشتر از این مقدار منجر به ایجاد یک پیوند شاتکی با ولتاژ شکست بسیار کم در ناحیه بایاس معکوس می شود. همچنین بهترین ضخامت لایه آلومینیومی برابر با 1/1 میکرو-متر به دست آمد. این ضخامت منجر به بیشترین مقدار پاسخ نوری در آشکارساز مورد مطالعه می شود.

چکیده انگلیسی:

Metal-Semiconductor-Metal photodetectors consist of two metallic contacts and an aperture for photon absorption. An MSM photodetector has low dark current, because one of the contacts is always in the reverse bias region. In this paper, we studied the impact of aluminum (metal contact) characteristics on the dark current, photocurrent, and photo-response of a silicon-based MSM photodetector. Metal work function has a small variation in different deposition processes. Impact of metal work function and layer thickness on the performance of MSM photodetector are studied. To this aim, an MSM photodetector is simulated and the dark current, photocurrent, and the photo-response of the structure are investigated. The analyses show that aluminum work function and thickness have a direct effect on the dark current, photocurrent, and photo-response of the photodetector which can change the structure from a photovoltaic to a photoconductive device if the mentioned parameters are not selected well. Therefore, these parameters should be optimized in the design stage. In this study, for a symmetric MSM photodetector, the optimal work function was achieved to be 4.26 eV. Work functions less than this value result in an ohmic contact between the aluminum layer and the silicon layer, and work functions more than this value result in a Schottky junction with a very low breakdown voltage in the reverse bias region which both regions degrade performance of the photodetector. Moreover, the best aluminum layer thickness was obtained to be 1.1 μm. This thickness leads to the maximized photo-response in the photodetector.

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