Thermal Oxidation Times Effect on Structural and Morphological Properties of Molybdenum Oxide Thin Films Grown on Quartz Substrates

Subject Areas : Polymer

Alireza Hojabri ¹ , Fatemeh Hajakbari ² , Yalda Ghodrat ³

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Received: 2015-12-28 Accepted : 2015-12-28 Published : 2015-10-01

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Abstract :

Molybdenumoxide(α-MoO)thin filmswere prepared on quartzand silicon substrates by thermal oxidation of Mo thin films depositedusingDC magnetron sputtering method. Theinfluence of thermal oxidation times ranging from 60-240 min on the structural and morphological properties ofthe preparedfilms was investigated usingX-ray diffraction,Atomic force microscopy and Fourier transforminfrared spectroscopy. The XRD results revealed that the as depositedfilmwas amorphouswhilethoseformed at thermal oxidationtimes between 60-180 min exhibited polycrystalline orthorhombic molybdenumoxides. Thepresence of (0k0) reflections in XRD patterns indicated the layered structure of α-MoO. Also the surface morphology ofthe films isdependent on the thermal oxidation times. The FTIR spectrum confirmed the formationof MoO3 and the peakat 992.53 cm-1 implythelayered structure of α-MoO3.