Effect of AFM Cantilever Geometry on the DPL Nanomachining Process

Subject Areas : Mechanical Engineering

A. R.  Norouzi ¹ (Department of New Sciences and Technologies, University of Tehran, Tehran, Iran)
M.  Tahmasebipour ² (Faculty of New sciences and Technologies, University of Tehran, Tehran, Iran)

Received: 2016-08-18 Accepted : 2016-11-03 Published : 2016-12-24

Keywords: AFM nanomachining, Dynamic plowing lithography, DPL nanomachining, Nano lithography, AFM Beam, Oscillating tip,

Abstract :

With the development of micro and nanotechnology, machining methods at micro and nanoscale have now become interesting research topics. One of the recently-proposed methods for sub-micron machining, especially nanomachining, is dynamic plowing lithography (DPL) method. In this method an oscillating tip is used for machining soft materials such as polymers. The geometry of the oscillating beam and its vibrational properties are the most important parameters in this nanomachining process. In this study, effects of the AFM beam geometry on its stiffness coefficient, resonant frequency, beam stability, and the maximum stress created in the beam structure were investigated for 12 different general shapes using the finite element method. The obtained results indicate that circular and square membranes are the most favourable AFM cantilever geometries because these structures provide higher machining force and speed; while for noisy conditions and environments, straight and V-shaped beams are recommended (because of their higher stability factor) for the DPL nanomachining process.

References:

[1]   Huang, L., Braunschweig, A. B., Shim, W., Qin, L., and Lim, J. K., et al., “Matrix‐Assisted Dip‐Pen Nanolithography and Polymer Pen Lithography”, Small, Vol. 6, No. 10, 2010, pp. 1077–1081.

[2]   Gnecco, E., Riedo, E., King, W. P., Marder, S. R., and Szoszkiewicz, R.,. “Linear Ripples and Traveling Circular Ripples Produced on Polymers by Thermal AFM Probes”, Physical Review B, Vol. 79, No. 23, 2009, pp. 235421.

[3]   Sumomogi, T., Endo, T., Kuwahara, K., Kaneko, R., and Miyamoto, T., “Micromachining of Metal Surfaces by Scanning Probe Microscope”, Journal of Vacuum Science & Technology B, Vol. 12, No. 3, 1994, pp. 1876–1880.

[4]   Yan, Y., Hu, Z., Zhao, X., Sun, T., Dong, S., and Li, X., “Top‐Down Nanomechanical Machining of Three‐Dimensional Nanostructures by Atomic Force Microscopy”, Small, Vol. 6, No. 6, 2010, pp. 724-728.

[5]   Yan, Y., Sun, T., Liang, Y., and Dong, S., “Investigation on AFM-based Micro/nano-CNC Machining System”, International Journal of Machine Tools and Manufacture, Vol. 47, No. 11, 2007, pp. 1651-1659.

[6]   Cappella, B., Sturm, H., “Comparison Between Dynamic Plowing Lithography and Nanoindentation Methods”, Journal of Applied Physics, Vol. 91, No. 1, 2002, pp. 506–512.

[7]   Cappella, B., Sturm, H., Weidner, S. M., “Breaking Polymer Chains by Dynamic Plowing Lithography”, Polymer, Vol. 43, No. 16, 2002, pp. 4461-4466.

[8]   Su, C., Huang, L., and Kjoller, K., “Direct measurement of Tapping Force With a Cantilever Deflection Force Sensor”, Ultramicroscopy, Vol. 100, No. 3, 2004, pp. 233-239.

[9]   Salapaka, M. V., Chen, D. J., and Cleveland, J. P., “Linearity of Amplitude and Phase in Tapping-Mode Atomic force Microscopy”, Physical Review B, Vol. 61, No. 2, 2000, pp. 1106.

[10] Sader, J. E., “Frequency Response of Cantilever Beams Immersed in Viscous Fluids With Applications to the Atomic Force Microscope”, Journal of Applied Physics, Vol. 84, No. 1, 1998, pp. 64-76.

[11] Neumeister, J. M., Ducker, W. A., “Lateral, Normal, and Longitudinal Spring Constants of Atomic Force Microscopy Cantilevers”, Review of Scientific Instruments, Vol. 65, No. 8, 1994, pp. 2527-2531.

[12] Delnavaz, A., Mahmoodi, S. N., Jalili, N., and Zohoor, H., “Linear and Nonlinear Approaches Towards Amplitude Modulation Atomic Force Microscopy”, Current Applied Physics, Vol. 10, No. 6, 2010, pp. 1416-1421.

[13] Sader, J. E., “Parallel Beam Approximation for V‐Shaped Atomic Force Microscope Cantilevers”, Review of Scientific Instruments, Vol. 66, No. 9, 1995, pp. 4583-4587.

[14] J. Chen, R. K. Workman, D. Sarid, and R. Hoper, “Numerical Simulations of a Scanning Force Microscope With a Large-Amplitude Vibrating Cantilever,” Nanotechnology, Vol. 5, No. 4, 1994, pp. 199.

[15] Van Eysden, C. A., Sader, J. E., “Frequency Response of Cantilever Beams Immersed in Compressible Fluids With Applications to the Atomic Force Microscope”, Journal of Applied Physics, Vol. 106, No. 9, 2009, pp. 94904.

[16] Tamayo, J., Garcia, R., “Deformation, Contact Time, and Phase Contrast in Tapping Mode Scanning Force Microscopy”, Langmuir, Vol. 12, No. 18, 1996, pp. 4430-4435.

[17] Van Eysden, C. A., Sader, J. E., “Frequency Response of Cantilever Beams Immersed in Viscous Fluids With Applications to the Atomic Force Microscope: Arbitrary mode order”, Journal of Applied Physics, Vol. 101, No. 4, 2007, pp. 44908.

[18] Levy, R., Maaloum, M., “Measuring the Spring Constant of Atomic Force Microscope Cantilevers: Thermal Fluctuations and Other Methods”, Nanotechnology, Vol. 13, No. 1, 2002, pp. 33.

[19] Schäffer, T. E., Cleveland, J. P., Ohnesorge, F., Walters, D. A., and Hansma, P. K., “Studies of Vibrating Atomic Force Microscope Cantilevers in Liquid”, Journal of Applied Physics, Vol. 80, No. 7, 1996, pp. 3622-3627.

[20] Green, C. P., Sader, J. E., “Frequency Response of Cantilever Beams Immersed in Viscous Fluids Near a Solid Surface With Applications to the Atomic Force Microscope”, Journal of Applied Physics, Vol. 98, No. 11, 2005, p-. 114913.

[21] Liu, W., Yan, Y., Hu, Z., Zhao, X., Yan, J., and Dong, S., “Study on the Nano Machining Process With a Vibrating AFM tip on the Polymer Surface”, Applied Surface Science, Vol. 258, No. 7, 2012, pp. 2620–2626.

[22]         Gibson, C. T., Weeks, B. L., Abell, C., Rayment, T., and Myhra, S., “Calibration of AFM Cantilever Spring Constants,” Ultramicroscopy, Vol. 97, No. 1, 2003, pp. 113-118.