@article{
  author = {Goodarzi, Mohammad},
  title = {Fractional Order Control of Micro Electro-Mechanical Systems},
  journal = {Journal of Modern Processes in Manufacturing and Production},
  year = {2016},
  volume = {5},
  issue = {2},
  pages = {55-67},
  doi = {},
  url = {https://sanad.iau.ir/fa/Article/997099}
}