@article{
  author = {manouchehrian, mehdi},
  title = {Effect of N2 partial pressure on the structural and mechanical properties of TaN films},
  journal = {Journal of Advanced Materials and Processing},
  year = {2016},
  volume = {4},
  issue = {4},
  pages = {30-36},
  doi = {},
  url = {https://sanad.iau.ir/fa/Article/981447}
}