%0 Journal Article %A Tahmasebipour, Mohammad, Tahmasebipour, Younes, Boujari Aliabadi, Mahya, Ebrahimi, Shadi %T Micro Electropolishing of the MEMS Metallic Structures Fabricated by the Micro WEDM Process %J International Journal of Advanced Design and Manufacturing Technology %V 15 %N 1 %P 11-19 %D 2022 %R 10.30486/admt.2022.1928592.1277 %U https://sanad.iau.ir/fa/Article/873694