TY  - JOUR
AU  - Tahmasebipour, Mohammad
AU  - Tahmasebipour, Younes
AU  - Vafaie, Ali
TI  - Micro Wire Electrical Discharge Machining of MEMS Structures with Optimized Dimensional Deviation
JO  - International Journal of Advanced Design and Manufacturing Technology
VL  - 12
IS  - 2
SP  - 103
EP  - 109
PY  - 2019
DO  - 
ER  -