%0 Journal Article %A Tahmasebipour, Mohammad, Tahmasebipour, Younes, Vafaie, Ali %T Micro Wire Electrical Discharge Machining of MEMS Structures with Optimized Dimensional Deviation %J International Journal of Advanced Design and Manufacturing Technology %V 12 %N 2 %P 103-109 %D 2019 %R %U https://sanad.iau.ir/fa/Article/873515