@article{ author = {Tahmasebipour, Mohammad, Tahmasebipour, Younes, Vafaie, Ali}, title = {Micro Wire Electrical Discharge Machining of MEMS Structures with Optimized Dimensional Deviation}, journal = {International Journal of Advanced Design and Manufacturing Technology}, year = {2019}, volume = {12}, number = {2}, pages = {103-109}, doi = {} }