TY  - JOUR
AU  - Hajakbari, Fatemeh
TI  - Preparation and Characterization of Aluminum Nitride Thin Films with the Potential Application in Electro-Acoustic Devices
JO  - Journal of Applied Chemical Research
VL  - 14
IS  - 2
SP  - 48
EP  - 57
PY  - 2020
DO  - 
ER  -