%0 Journal Article
%A Hajakbari, Fatemeh
%T Preparation and Characterization of Aluminum Nitride Thin Films with the Potential Application in Electro-Acoustic Devices
%J Journal of Applied Chemical Research
%V 14
%N 2
%P 48-57
%D 2020
%R 
%U https://sanad.iau.ir/fa/Article/865538