@article{
  author = {Hajakbari, Fatemeh, Hojabri, Alireza, Mojtahedzadeh Larijani, Majid},
  title = {Effect of Thickness on Structural and Morphological Properties of AlN Films Prepared Using Single Ion Beam Sputtering},
  journal = {Journal of Applied Chemical Research},
  year = {2014},
  volume = {8},
  issue = {3},
  pages = {45-52},
  doi = {},
  url = {https://sanad.iau.ir/fa/Article/865521}
}