TY  - JOUR
AU  - Hajakbari, Fatemeh
AU  - Hojabri, Alireza
AU  - Mojtahedzadeh Larijani, Majid
TI  - Effect of Thickness on Structural and Morphological Properties of AlN Films Prepared Using Single Ion Beam Sputtering
JO  - Journal of Applied Chemical Research
VL  - 8
IS  - 3
SP  - 45
EP  - 52
PY  - 2014
DO  - 
ER  -