%0 Journal Article
%A Hajakbari, Fatemeh, Hojabri, Alireza, Mojtahedzadeh Larijani, Majid
%T Effect of Thickness on Structural and Morphological Properties of AlN Films Prepared Using Single Ion Beam Sputtering
%J Journal of Applied Chemical Research
%V 8
%N 3
%P 45-52
%D 2014
%R 
%U https://sanad.iau.ir/fa/Article/865521