TY  - JOUR
AU  - Khoram, Mansour
AU  - Ghomi, Hamid
TI  - Influence of ion-neutral collision parameters on dynamic structure of magnetized sheath during plasma immersion ion implantation
JO  - Journal of Theoretical and Applied Physics
VL  - 0
IS  - 1
SP  - 41
EP  - 46
PY  - 2016
DO  - 10.1007/s40094-015-0199-z
ER  -