TY  - JOUR
AU  - Firouzabadi, Siavash
AU  - Dehghani, Kamran
AU  - Naderi, Malek
AU  - Mahboubi, Farzad
TI  - Fracture toughness and plasticity evaluation of sputter deposited tantalum nitride thin film
JO  - Advanced Processes in Materials Engineering
VL  - 13
IS  - 1
SP  - 103
EP  - 113
PY  - 2019
DO  - 
ER  -