TY  - JOUR
AU  - Zakour, Sihem Ben
AU  - Taleb, Hassen
TI  - Endpoint in plasma etch process using new modified w-multivariate charts and windowed regression
JO  - Journal of Industrial Engineering International
VL  - 13
IS  - 3
SP  - 0
EP  - 0
PY  - 2017
DO  - 
ER  -