@article{
  author = {Zakour, Sihem Ben, Taleb, Hassen},
  title = {Endpoint in plasma etch process using new modified w-multivariate charts and windowed regression},
  journal = {Journal of Industrial Engineering International},
  year = {2017},
  volume = {13},
  number = {3},
  pages = {0-0},
  doi = {}
}