The growth of Diamond like carbon nanostructures: Investigation of the affecting factors
Morasa Amani Malkeshi
1
(
aDepartment of chemistry, Faculty of Basic Sciences, Sciences and Research Branch, Islamic
Azad University, Tehran, Iran
)
karim Zare
2
(
Islamic azad university
)
Mahmood Ghorannevis
3
(
Plasma Physics Research Center, Science and Research Branch, Islamic Azad University
)
Zohre Ghorannevis
4
(
Department of Physics, Karaj Branch, Islamic Azad University, Karaj, Iran
)
omid Moradi
5
(
Department of Chemistry , ShahrQods Branch, Islamic Azad University , ShahreQods , Iran
)
Keywords: XRD, SEM, temperature, Raman spectroscopy, DLC,
Abstract :
Using DC- Plasma Enhanced Chemical Vapor Deposition (PECVD) system, the impact of pure Co on the growth of diamond-like carbon (DLC) nano-structures was investigated. In this study, Acetylene (C2H2) was diluted in H2 and used as the reaction gas and Co nano-particles were used as the catalyst. The effect of preparing Co catalyst on temperatures of 240ο C and 350ο C and growth conditions was studied. The results showed that the Co catalyst sputtering at 350ο-C temperature has a significant impact on purity, morphology, and synthesized diamond-like carbon nano- structures. This research was conducted to investigate the effect of catalyst preparation and growth conditions. Scanning Electron Microscopy (SEM), X-ray diffraction (XRD), Raman spectroscopy were used to characterize the diamond-like carbon nano- structures produced under different conditions.Using DC- Plasma Enhanced Chemical Vapor Deposition (PECVD) system, the impact of pure Co on the growth of diamond-like carbon (DLC) nano-structures was investigated. In this study, Acetylene (C2H2) was diluted in H2 and used as the reaction gas and Co nano-particles were used as the catalyst. The effect of preparing Co catalyst on temperatures of 240ο C and 350ο C and growth conditions was studied. The results showed that the Co catalyst sputtering at 350ο-C temperature has a significant impact on purity, morphology, and synthesized diamond-like carbon nano- structures. This research was conducted to investigate the effect of catalyst preparation and growth conditions. Scanning Electron Microscopy (SEM), X-ray diffraction (XRD), Raman spectroscopy were used to characterize the diamond-like carbon nano- structures produced under